15 September 2026
A Lithographer’s Perspective on Manufacturing Waveguide Combiners for AR Glasses

Haico Kok
ASML

Optical reduction lithography is an established technique for producing waveguide combiners used in AR glasses. This approach leverages the well-developed infrastructure of the semiconductor supply chain, offering mature, reliable tools capable of supporting high-volume production.
Nevertheless, a waveguide combiner is a fundamentally different product than a semiconductor chip. It has its own unique set of requirements raising the valid question of how a lithography tool designed for chip manufacturing can address these.
This masterclass will explore the requirements involved and assess how lithography tools measure up to them. We’ll illustrate that some commonly mentioned industry challenges are either nonexistent or can be effectively addressed, although certain factors still require attention from waveguide combiner designers. As is true with any advanced technology, the best results come from jointly refining both product design and manufacturing methods, starting with a solid understanding of the relevant production processes.