Printed Metaoptics for AR/VR and Photonics

Full wafer scale fabrication of high-efficiency, all-inorganic optical devices including metalenses, AR/VR waveguides, and polarization-controlled metasurfaces and splitters for operation at visible and near-IR wavelengths is demonstrated by using additive nanoimprint lithography with nanoparticle dispersion-based inks. For example, approximately one-thousand 4-mm-sized metalenses are fabricated per 8-inch wafer with high optical efficiency and excellent uniformity across the wafer. The absolute and relative efficiencies of the metalenses are more than 80% and 90%, respectively, which are approximately 95% of the maximum simulated efficiencies for this specific design. The close agreement between simulated and realized efficiencies indicates that future improvements are possible, and actual efficiencies are not limited by materials or process. The use of nanoparticle dispersion inks enables the fabrication of all-inorganic high MTF AR waveguides with imprint cycle times of a few minutes. Refractive index of the metalens, metasurface, and waveguide structures can be increased up to 2.3 using a short post-imprint atomic layer deposition process. Combined these attributes offer superior performance and a reduced cost of manufacturing. The imprinted metalenses and waveguides are free from organics due to a post-imprint processing step and exhibit outstanding dimensional and optical stabilities, as confirmed by accelerated environmental testing. This work opens a path for true, full-scale additive manufacturing and integration of meta-optics on optical glass and Si platforms.