Monolithic MicroLED Microdisplays for AR Applications

The recent progress of microLED microdisplays at JBD is discussed. Full color projectors based on
combining three 4.0um pitch monochromatic RGB panels with an X-cube are already in mass
production and used in commercially available AR and smart glasses products. However, a monolithic
single panel microLED solution remains elusive. An all-native 5.0um pitch monolithic panel is
developed utilising InGaN-based blue and green emitter and a phosphide-based red emitter. The
epiwafers are integrated by coaxially and vertically stacking the emitters using a combination of metal
and dielectric based wafer bonding scheme.
A three dimensional contact metallisation network is developed to provide electrical access to the
individual emitters. Photon blocking structures are used to mitigate optical crosstalk and the microlens
structure optimised to improve coupling into the waveguides. The evolution of the design aspects of
the monolithic panel architecture such as positioning of the emitters, minimising edge effects and the
choice of material for Red will be discussed. Finally, the electro-optical characteristics of the
monolithic panel and forward looking projections will be presented.