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Thin-Film Solid-State Batteries - All Dry Multi-Stack Microbatteries

Thin-Film Solid-State Batteries - sometimes known as “Microbatteries” - can power wireless sensors, smart cards, active RFID tags, and microelectronics as SMT components. This is an active area of research with tremendous potential for future advancements.

Group for Thin-Film Batteries @Empa led by @Yaroslav Romanyuk ( is exploiting the 2D thin-film geometry to discover novel materials and investigate interface phenomena, paving the way for the next generation of solid-state batteries.

Here, we offer a sneak peek, including a unique patent-pending monolithic multi-cell solid-state battery manufactured using all-dry vacuum processes offering rapid charge/discharge. Here the calculated performance of a monolithic multi-cell battery is shown on a Ragone plot, showing it can potentially outperform Li-ion batteries in terms of power density (W/Kg), offering a rapid charge in less than a minute.

The latest results and developments will be presented at TechBlick’s event on (1) Solid-State Batteries and (b) Solid-State Battery Materials on 15-16 Feb 2023 online.

✔️ Slide 1: Fabrication line for all-vacuum thin-film solid-state batteries. Manufacturing methods include various physical vapor deposition (PVD) processes, such as magnetron sputtering and thermal evaporation. The manufacturing chambers are connected to argon-filled gloveboxes for in-situ transfer. Atomic layer deposition (ALD) is used to deposit conformal interlayers and coatings, and flash-lamp annealing (FLA) is suitable for the rapid crystallization of individual layers.

✔️ Slide 2: Recent research highlights of our group at Empa include stable multi-electron cycling of Li-rich NMC811 thin-film cathodes within a wide voltage range [1], ultra-thin amorphous LLZO insulating coatings to block lithium dendrites [2], amorphous carbon interlayers at the Cu/LiPON interface to facilitate homogeneous Li plating and stripping in an anode-free configuration [3], and flash-lamp annealing of layered oxide cathodes that enable flexible aluminum foils as conductive substrates [4].

✔️ Slide 3: Sequential deposition of individual thin-film cells using all-dry vacuum methods results in a monolithic stack, which can increase the capacity of the individual cell while maintaining the advantages of thin-film geometry, such as fast charging and discharging and a long lifetime

✔️ Slide 4: Calculations showing that the monolithically-stacked multi-cell battery can achieve power performance comparable to supercapacitors combined with high energy densities, enabling new applications demanding safe, high-power sources with easy thermal management.

These results and much more will be presented at TechBlick’s event on (a) Frontier Battery Materials and (b) Solid-State Battery Materials on 15-16 Feb 2023 online.

This is a world-class agenda - please check out the agenda and sign up now

Speakers include General Motors, Sila Nanotechnologies, Li Metal, Skeleton Technologies, Solid State Battery, Leyden Jar Technologies B.V., Graphenix Development, Brookhaven National Laboratory, Fraunhofer IKTS, RWTH Aachen University, Lawrence Livermore National Laboratories, Meta Materials Inc, Argonne National Laboratories, OneD Battery Sciences, VTT, b-Science, Rho Motion, Wevo-Chemie, LiNA Energy, CNM Technologies, Ionblox, Empa, Zinc8 Energy Solutions, Avicenne Energy, Echiontech, South8 Technologies, Basquevolt, NanoXplore, Chasm, & Fraunhofer ISI

[1] A. Aribia, J. Sastre, X. Chen, M.H. Futscher, M. Rumpel, A. Priebe, M. Döbeli, N. Osenciat, A.N. Tiwari, Y.E. Romanyuk, "Unlocking Stable Multi-Electron Cycling in NMC811 Thin-Films between 1.5 – 4.7 V", Adv. Energy Mater. 2022, 2201750.

[2] J. Sastre, M.H. Futscher, L. Pompizi, A. Aribia, A. Priebe, J. Overbeck, M. Stiefel, A.N. Tiwari, Y.E. Romanyuk, "Blocking Lithium Dendrite Growth in Solid-State Batteries with an Ultrathin Amorphous Li-La-Zr-O Solid Electrolyte", Comm. Mater. 2021, 2, 76.

[3] M.H. Futscher, T. Amelal, J. Sastre, A. Müller, J. Patidar, A. Aribia, K. Thorwarth, S. Siol, Y.E. Romanyuk, "Influence of Amorphous Carbon Interlayers on Nucleation and Early Growth of Lithium Metal at the Current Collector-Solid Electrolyte Interface", J. Mater. Chem. A 2022, 10, 15535.

[4] X. Chen, J. Sastre, A. Aribia, E. Gilshtein, Y.E. Romanyuk, "Flash Lamp Annealing Enables Thin-Film Solid-State Batteries on Aluminum Foil", ACS Appl. Energy Mater. 2021, 4, 5408.

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