Micro LED Full Wafer Inspection by using Photoluminescence

In this presentation we will introduce our latest technology in micro-LED wafer inspection based on photoluminescence analysis. We are introducing our new imaging module mounted in our full wafer micro-LED inspection machine. This imaging module can simultaneously capture intensity and wavelength of light emitted from micro-LEDs by illuminating them with a stable light source. It allows a rapid acquisition of the photoluminescence over the whole wafer surface. By detecting the intensity and wavelength of the micro-LED emission the system makes quick pass/fail decisions to find abnormalities on the surface and semiconductor level.